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Practical extracting method of PEB parameters by using rotating compensator spectroscopic ellipsometer

Author(s):
Kim, H.-H. ( Hanyang Univ. (South Korea) )
Kwon, Y.-K. ( Hanyang Univ. (South Korea) )
Park, S.-W. ( Nanyang Univ. (South Korea) )
Bang, K.-Y. ( Hanyang Univ. (South Korea) )
An, I. ( Hanyang Univ. (South Korea) )
Lee, K.-S. ( Hanyang Univ. (South Korea) )
Oh, H.-K. ( Hanyang Univ. (South Korea) )
2 more
Publication title:
Advances in Resist Technology and Processing XX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5039
Pub. Year:
2003
Vol.:
2
Pt.:
Poster Session
Page(from):
1124
Page(to):
1131
Pages:
8
Pub. info.:
Bellingham, CA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448446 [0819448443]
Language:
English
Call no.:
P63600/5039
Type:
Conference Proceedings

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