New materials for 193-nm bottom antireflective coatings
- Author(s):
- Weimer, M. ( Brewer Science, Inc. (USA) )
- Krishnamurthy, V. ( Brewer Science, Inc. (USA) )
- Fowler, S. ( Brewer Science, Inc. (USA) )
- Nesbit, C. ( Brewer Science, Inc. (USA) )
- Claypool, J.B. ( Brewer Science, Inc. (USA) )
- Publication title:
- Advances in Resist Technology and Processing XX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5039
- Pub. Year:
- 2003
- Vol.:
- 2
- Pt.:
- Poster Session
- Page(from):
- 866
- Page(to):
- 871
- Pages:
- 6
- Pub. info.:
- Bellingham, CA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448446 [0819448443]
- Language:
- English
- Call no.:
- P63600/5039
- Type:
- Conference Proceedings
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