Line-edge roughness reduction and CD slimming using hardback processing

Line-edge roughness reduction and CD slimming using hardback processing

Author(s):

Peters, R.D. ( Motorola, Inc. (USA) )

Lucas, K. ( Motorola, Inc. (USA) )

Cobb, J.L. ( Motorola, Inc. (USA) )

Parker, C. ( Motorola, Inc. (USA) )

Patterson, K. ( Motorola, Inc. (France) )

McCauley, R. ( Motorola, Inc. (USA) )

Ercken, M. ( IMEC (Belgium) )

Roey, F.V. ( IMEC (Belgium) )

Vandenbroeck, N. ( IMEC (Belgium) )

Pollentier, I.K. ( IMEC (Belgium) )

5 more

Publication title:

Metrology, Inspection, and Process Control for Microlithography XVII

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5038

Pub. Year:

2003

Vol.:

2

Page(from):

1131

Page(to):

1142

Pages:

12

Pub. info.:

Bellingham, WA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819448439 [0819448435]

Language:

English

Call no.:

P63600/5038

Type:

Conference Proceedings

Details

TDL ID:	ZA00013025
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Metrology, Inspection, and Process Control for Microlithography
Conf. info. (Number):	2003 : 17th
Conf. info. (Venue):	Santa Clara, California, USA
Conf. info. (Date):	2003.02.24-2003.02.27
Note for article:	Poster Session ; 5038-144

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