Line-edge roughness reduction and CD slimming using hardback processing
- Author(s):
Peters, R.D. ( Motorola, Inc. (USA) ) Lucas, K. ( Motorola, Inc. (USA) ) Cobb, J.L. ( Motorola, Inc. (USA) ) Parker, C. ( Motorola, Inc. (USA) ) Patterson, K. ( Motorola, Inc. (France) ) McCauley, R. ( Motorola, Inc. (USA) ) Ercken, M. ( IMEC (Belgium) ) Roey, F.V. ( IMEC (Belgium) ) Vandenbroeck, N. ( IMEC (Belgium) ) Pollentier, I.K. ( IMEC (Belgium) ) - Publication title:
- Metrology, Inspection, and Process Control for Microlithography XVII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5038
- Pub. Year:
- 2003
- Vol.:
- 2
- Page(from):
- 1131
- Page(to):
- 1142
- Pages:
- 12
- Pub. info.:
- Bellingham, WA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448439 [0819448435]
- Language:
- English
- Call no.:
- P63600/5038
- Type:
- Conference Proceedings
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