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Three-dimensional measurement by tilting and moving objective lens in CD-SEM

Author(s):
Kimura, K. ( Topcon Corp. (Japan) )
Abe, K. ( Topcon Corp. (Japan) )
Tsuruga, Y. ( Topcon Corp. (Japan) )
Suzuki, H. ( Topcon Corp. (Japan) )
Kochi, N. ( Topcon Corp. (Japan) )
Koike, H. ( Topcon Corp. (Japan) )
Yamazaki, Y. ( Toshiba Semiconductor Co. (Japan) )
2 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XVII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5038
Pub. Year:
2003
Vol.:
2
Page(from):
1089
Page(to):
1094
Pages:
6
Pub. info.:
Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448439 [0819448435]
Language:
English
Call no.:
P63600/5038
Type:
Conference Proceedings

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