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Making carbon nanotube probes for high aspect ratio scanning probe metrology

Author(s):
Emirov, Y.N. ( Univ. of South Florida (USA) )
Beerbom, M. ( Univ. of South Florida (USA) )
Walters, D.A. ( Univ. of Central Florida (USA) )
Ren, Z.F. ( Boston College (USA) )
Huang, Z.P. ( NanoLab, Inc. (USA) )
Rossie, B.B. ( Univ. of South Florida (USA) )
Schlaf, R. ( Univ. of South Florida (USA) )
2 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XVII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5038
Pub. Year:
2003
Vol.:
1
Page(from):
493
Page(to):
495
Pages:
3
Pub. info.:
Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448439 [0819448435]
Language:
English
Call no.:
P63600/5038
Type:
Conference Proceedings

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