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Characterization of charging in CD-SEM for 90-nm metrology and beyond

Author(s):
  • Chen, L.-J. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) )
  • Lin, S.-W. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) )
  • Gau, T.-S. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) )
  • Lin, B.J. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) )
Publication title:
Metrology, Inspection, and Process Control for Microlithography XVII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5038
Pub. Year:
2003
Vol.:
1
Page(from):
166
Page(to):
176
Pages:
11
Pub. info.:
Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448439 [0819448435]
Language:
English
Call no.:
P63600/5038
Type:
Conference Proceedings

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