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Energy flux method for inspection of contact and VIA layer reticles

Author(s):
Garcia, H.I. ( KLA-Tencor Corp. (USA) )
Volk, W.W. ( KLA-Tencor Corp. (USA) )
Xiong, Y. ( KLA-Tencor Corp. (USA) )
Watson, S.G. ( KLA-Tencor Corp. (USA) )
Yu, Z. ( KLA-Tencor Corp. (USA) )
Guo, Z. ( KLA-Tencor Corp. (USA) )
Wang, L. ( KLA-Tencor Corp. (USA) )
2 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XVII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5038
Pub. Year:
2003
Vol.:
1
Page(from):
81
Page(to):
92
Pages:
12
Pub. info.:
Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448439 [0819448435]
Language:
English
Call no.:
P63600/5038
Type:
Conference Proceedings

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