Fabrication of Step and Flash imprint lithography templates using commercial mask processes

Fabrication of Step and Flash imprint lithography templates using commercial mask processes

Author(s):

Thompson, E. ( Molecular Imprints, Inc. (USA) )
Rhyins, P.D. ( Photronics, Inc. (USA) )
Voisin, R.D. ( Molecular Imprints, Inc. (USA) )
Sreenivasan, S.V. ( Molecular Imprints, Inc. (USA) )
Martin, P.M. ( Photronics, Inc. (USA) )

Publication title:

Emerging Lithographic Technologies VII

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5037

Pub. Year:

2003

Vol.:

2

Pt.:

Poster Session

Page(from):

1019

Page(to):

1028

Pages:

10

Pub. info.:

Bellingham, WA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819448422 [0819448427]

Language:

English

Call no.:

P63600/5037

Type:

Conference Proceedings

Details

TDL ID:	ZA00013023
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Emerging Lithographic Technologies
Conf. info. (Number):	2003 : 7th
Conf. info. (Venue):	Santa Clara, California, USA
Conf. info. (Date):	2003.02.25-2003.02.27
Note for article:	Poster Session ; 5037-123

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