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Printability of opaque and clear phase defects using the finite-difference time-domain (FDTD) method

Author(s):
  • Krautschik, C.G. ( Association of Super-Advanced Electronics Technologies (Japan) )
  • Nishiyama, I. ( Association of Super-Advanced Electronics Technologies (Japan) )
Publication title:
Emerging Lithographic Technologies VII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5037
Pub. Year:
2003
Vol.:
2
Pt.:
Poster Session
Page(from):
831
Page(to):
840
Pages:
10
Pub. info.:
Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448422 [0819448427]
Language:
English
Call no.:
P63600/5037
Type:
Conference Proceedings

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