Development of liquid-jet laser-produced plasma light source for EUV lithography
- Author(s):
Abe, T. ( Extreme Ultraviolet Lithography System Development Association (Japan) ) Suganuma, T. ( Extreme Ultraviolet Lithography System Development Association (Japan) ) Imai, Y. ( Extreme Ultraviolet Lithography System Development Association (Japan) ) Sugimoto, Y. ( Extreme Ultraviolet Lithography System Development Association (Japan) ) Someya, H. ( Extreme Ultraviolet Lithography System Development Association (Japan) ) Hoshino, H. ( Extreme Ultraviolet Lithography System Development Association (Japan) ) Soumagne, G. ( Extreme Ultraviolet Lithography System Development Association (Japan) ) Komori, H. ( Extreme Ultraviolet Lithography System Development Association (Japan) ) Mizoguchi, H. ( Extreme Ultraviolet Lithography System Development Association (Japan) ) Endo, A. ( Extreme Ultraviolet Lithography System Development Association (Japan) ) Toyoda, K. ( Extreme Ultraviolet Lithography System Development Association (Japan) ) - Publication title:
- Emerging Lithographic Technologies VII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5037
- Pub. Year:
- 2003
- Vol.:
- 2
- Pt.:
- Poster Session
- Page(from):
- 776
- Page(to):
- 783
- Pages:
- 8
- Pub. info.:
- Bellingham, WA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448422 [0819448427]
- Language:
- English
- Call no.:
- P63600/5037
- Type:
- Conference Proceedings
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