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Design and method of fabricating phase-shift masks for extreme-ultraviolet lithography by partial etching into the EUV multilayer mirror

Author(s):
Han, S.-I. ( Motorola, Inc. (USA) )
Weisbrod, E. ( Motorola, Inc. (USA) )
Xie, Q. ( Motorola, Inc. (USA) )
Mangat, P.J.S. ( Motorola, Inc. (USA) )
Hector, S.D. ( Motorola, Inc. (USA) )
Dauksher, W.J. ( Motorola, Inc. (USA) )
1 more
Publication title:
Emerging Lithographic Technologies VII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5037
Pub. Year:
2003
Vol.:
1
Pt.:
Session 9
Page(from):
314
Page(to):
330
Pages:
17
Pub. info.:
Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448422 [0819448427]
Language:
English
Call no.:
P63600/5037
Type:
Conference Proceedings

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