On-line monitoring of the manufacturing process of optical microelements by means of controlled heating with laser

On-line monitoring of the manufacturing process of optical microelements by means of controlled heating with laser

Author(s):

Julia, J.E. ( Instituto Tecnologico de Optica (Spain) )
Estrela, R. ( Instituto Tecnologico de Optica (Spain) )

Publication title:

Selected Papers on Optics and Photonics: Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5024

Pub. Year:

2003

Page(from):

184

Page(to):

190

Pages:

7

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819448255 [0819448257]

Language:

English

Call no.:

P63600/5024

Type:

Conference Proceedings

Details

TDL ID:	ZA00013008
Series ID:	PA00000029
Conf. info. (Name):	Optics and Photonics

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