Combination lithography for photonic crystal circuits

Combination lithography for photonic crystal circuits

Author(s):

Murakowski, J.A. ( Univ. of Delaware (USA) )
Schneider, G.J. ( Univ. of Delaware (USA) )
Prather, D.W. ( Univ. of Delaware (USA) )

Publication title:

Photonic Crystal Materials and Devices

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5000

Pub. Year:

2003

Page(from):

43

Page(to):

50

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819448002 [0819448001]

Language:

English

Call no.:

P63600/5000

Type:

Conference Proceedings

Details

TDL ID:	ZA00012983
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Optoelectronic Materials and Devices : Photonic Crystal Materials and Devices
Conf. info. (Number):	2003
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2003.01.28-2003.01.30

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