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Combination lithography for photonic crystal circuits

Author(s):
Publication title:
Photonic Crystal Materials and Devices
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5000
Pub. date:
2003
Page(from):
43
Page(to):
50
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448002 [0819448001]
Language:
English
Call no.:
P63600/5000
Type:
Conference Proceedings

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