High-speed short-wavelength silicon photodetectors fabricated in 130-nm CMOS process (Invited Paper)

High-speed short-wavelength silicon photodetectors fabricated in 130-nm CMOS process (Invited Paper)

Author(s):

Csutak, S.M. ( Applied Optoelectronics Inc. (USA) )
Schaub, J.D. ( IBM Thomas J. Watson Research Ctr. (USA) )
Yang, B. ( Univ. of Texas at Austin (USA) )
Campbell, J.C. ( Univ. of Texas at Austin (USA) )

Publication title:

Photonics Packaging and Integration III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4997

Pub. Year:

2003

Page(from):

135

Page(to):

145

Pages:

11

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447975 [0819447978]

Language:

English

Call no.:

P63600/4997

Type:

Conference Proceedings

Details

TDL ID:	ZA00012980
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Optoelectronic Materials and Devices : Photonics packaging and integration
Conf. info. (Number):	2003 : 3rd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2003.01.28-2003.01.30

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