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Operation of spatial light modulators in DUV light

Author(s):
Dauderstaedt, U. ( Fraunhofer-Institut fuer Microelektronische Schaltungen und Systeme (Germany) )
Duerr, P.
Krellmann, M.
Karlin, T. ( Micronic Laser Systems AB (Sweden) )
Berzinsh, U.
Leonardsson, L.
Wendrock, H. ( Leibniz-Institut fuer Festkoerper-und Werkstoffforschung Dresden (Germany) )
2 more
Publication title:
MOEMS Display and Imaging Systems
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4985
Pub. Year:
2003
Page(from):
222
Page(to):
229
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447852 [0819447854]
Language:
English
Call no.:
P63600/4985
Type:
Conference Proceedings

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