High-resolution maskless lithography by the integration of micro-optics and point array technique

High-resolution maskless lithography by the integration of micro-optics and point array technique

Author(s):

Chan, K.F. ( Ball Semiconductor Inc. (USA) )
Feng, Z.
Yang, R.
Mei, W.

Publication title:

MOEMS Display and Imaging Systems

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4985

Pub. Year:

2003

Page(from):

37

Page(to):

43

Pages:

7

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447852 [0819447854]

Language:

English

Call no.:

P63600/4985

Type:

Conference Proceedings

Details

TDL ID:	ZA00012968
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MOEMS display and imaging systems
Conf. info. (Number):	2003
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2003.01.28-2003.01.29

Similar Items:

1 Conference Proceedings Design and fabrication of microlens and spatial filiter array by self-alignment Yang, R., Chan, K.F., Feng, Z., Mei, W. SPIE-The International Society for Optical Engineering	7 Conference Proceedings Rapid photolithographic technique for high-resolution micro-optics Dumbravescu, N. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Large-field ion optics for projection and proximity printing and for maskless lithography (MLZ) Loeschner, H., Stengl, G., Buschbeck, H., Chalupka, A., Lammer, G., Platzgummer, E., Vonach, H., de Jager, P.W.H., … SPIE-The International Society for Optical Engineering	8 Conference Proceedings High throughput maskless lithography: low voltage versus high voltage S. W. H. K. Steenbrink, B. J. Kampherbeek, M. J. Wieland, J. H. Chen, S. M. Chang Society of Photo-optical Instrumentation Engineers
3 Conference Proceedings Two-dimensional MEMS array for maskless lithography and wavefront modulation D. Lopez, V. A. Aksyuk, G. P. Watson, W. M. Mansfield, R. Cirelli, F. Klemens, F. Pardo, E. Ferry, J. Miner, T. W. … SPIE - The International Society of Optical Engineering	9 Conference Proceedings High-Resolution Airglow and Aurora Spectrograph(HIRAAS)sounding rocket experiment Dymond,K.F., Budzien,S.A., Carruthers,C.R., McCoy,R.P. SPIE - The International Society for Optical Engineering
4 Conference Proceedings Zone-plate-array lithography (ZPAL): optical maskless lithography for cost-effective patterning Rettig, C. L., Khodykin, O. V., Hoffman, J. R., Marx, W. F., Bowering, N. R., Vargas, E., Ershov, A. I., Fomenkov, I. … SPIE - The International Society of Optical Engineering	10 Conference Proceedings High-resolution x-ray fluorescence microtomography on single sediment particles Vincze,L., Vekemans,B., Szaloki,I., Janssens,K., Grieken,R.Van, Feng,H., Jones,K.W., Adams,F. SPIE-The International Society for Optical Engineering
5 Conference Proceedings Mapper: high throughput maskless lithography E. Slot, M. J. Wieland, G. de Boer, P. Kruit, G. F. ten Berge Society of Photo-optical Instrumentation Engineers	11 Conference Proceedings BINARY OPTICS MICROLENS ARRAYS IN CdTe Stern, M.B., Delaney, W.F., Holz, M., Kunz, K.P., Maschhoff, K.R., Welsch, J. Materials Research Society
6 Conference Proceedings High Resolution, High Fill Factor a-Si:H Sensor Arrays for Optical Imaging Apte, R. B., Boyce, J. B., Fulks, R. T., Ho, J., Lau, R., Lemmi, F., Lu, J. P., Mei, P., Nylen, P., Rahn, J. T., Ready, … Materials Research Society	12 Conference Proceedings Maskless 3D micromachining with focused ion beam of high-resolution diffractive optics Malek,C.G.Khan, Hartley,F.T., Neogi,J. SPIE - The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12