Overview of grey-scale photolithography for micro-optical elements fabrication
- Author(s):
- Publication title:
- Micromachining Technology for Micro-Optics and Nano-Optics
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4984
- Pub. Year:
- 2003
- Page(from):
- 111
- Page(to):
- 117
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447845 [0819447846]
- Language:
- English
- Call no.:
- P63600/4984
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
A novel method for fabrication of continous-relief optical elements (5874-29)
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
2
Conference Proceedings
Analog proximity-photolithography with mask aligners for the manufacturing of micro-optical elements
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Fabrication of gray-scale masks and diffractive optical elements with LDW glass
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Fractional Fourier domain filtering applied to improve image quality in photolithography
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
New approach for the fabrication of diffractive optical elements with rotationally symmetric phase distribution
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
Self-developing photopolymer for the fabrication of relief micro-optical elements
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Fabrication technologies for micro-optical elements with arbitrary surfaces
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Fabrication of replicated high-precision insert elements for micro-optical bench arrangements
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
6
Conference Proceedings
Potential of dry etching for the fabrication of fused-silica micro-optical elements
SPIE - The International Society for Optical Engineering |
12
Conference Proceedings
Design and fabrication of micro-optical elements for the generation of various novel beams and its optical tweezers [6027-09]
SPIE - The International Society of Optical Engineering |