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Overview of grey-scale photolithography for micro-optical elements fabrication

Author(s):
  • Cui, Z. ( Rutherford Appleton Lab. (United Kingdom) )
  • Du, J. ( Sichuan Univ. (China) )
  • Guo, Y. ( Sichuan Univ. (China) )
Publication title:
Micromachining Technology for Micro-Optics and Nano-Optics
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4984
Pub. Year:
2003
Page(from):
111
Page(to):
117
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447845 [0819447846]
Language:
English
Call no.:
P63600/4984
Type:
Conference Proceedings

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