Fabrication of infrared antennas using electron-beam lithography (Invited Paper)

Fabrication of infrared antennas using electron-beam lithography (Invited Paper)

Author(s):

Gritz, M.A. ( CREOL/Univ. of Central Florida (USA) )
Gonzalez, F.J. ( CREOL/Univ. of Central Florida (USA) )
Boreman, G.D. ( CREOL/Univ. of Central Florida (USA) )

Publication title:

Micromachining Technology for Micro-Optics and Nano-Optics

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4984

Pub. Year:

2003

Page(from):

100

Page(to):

110

Pages:

11

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447845 [0819447846]

Language:

English

Call no.:

P63600/4984

Type:

Conference Proceedings

Details

TDL ID:	ZA00012967
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Micromachining technology for micro-optics and nano-optics
Conf. info. (Number):	2003
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2003.01.28-2003.01.29

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