Zone-plate-array lithography (ZPL): a maskless fast-turn-around system for microoptic device fabrication (Invited Paper)
- Author(s):
- Menon, R. ( Massachusetts Institute of Technology (USA) )
- Gil, D. ( Massachusetts Institute of Technology (USA) )
- Carter, D.J.D. ( Charles Stark Draper Labs., Inc. (USA) )
- Patel, A. ( Massachusetts Institute of Technology (USA) )
- Smith, H.I. ( Massachusetts Institute of Technology (USA) )
- Publication title:
- Micromachining Technology for Micro-Optics and Nano-Optics
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4984
- Pub. Year:
- 2003
- Page(from):
- 10
- Page(to):
- 17
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447845 [0819447846]
- Language:
- English
- Call no.:
- P63600/4984
- Type:
- Conference Proceedings
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