Concept, modeling, and fabrication techniques for large-stroke piezoelectric unimorph deformable mirrors

Concept, modeling, and fabrication techniques for large-stroke piezoelectric unimorph deformable mirrors

Author(s):

Yang, E.-H. ( Jet Propulsion Lab. (USA) )
Shcheglov, K.
Trolier-McKinstry, S. ( The Pennsylvania State Univ. (USA) )

Publication title:

MOEMS and Miniaturized Systems III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4983

Pub. Year:

2003

Page(from):

326

Page(to):

333

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447838 [0819447838]

Language:

English

Call no.:

P63600/4983

Type:

Conference Proceedings

Details

TDL ID:	ZA00012966
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MOEMS and miniaturized systems
Conf. info. (Number):	2003 : 3rd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2003.01.27-2003.01.29

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