MOEMS spatial light modulator development at the Center for Adaptive Optics

MOEMS spatial light modulator development at the Center for Adaptive Optics

Author(s):

Krulevitch, P.A. ( Lawrence Livermore National Lab. (USA) )

Bierden, P.A. ( Boston Micromachines Corp. (USA) )

Bifano, T.G. ( Boston Univ. (USA) )

Carr, E. ( Lawrence Livermore National Lab. (USA) )

Dimas, C.E. ( Boston Micromachines Corp. (USA) )

Dyson, H. ( Univ. of California/Berkeley (USA) )

Helmbrecht, M.A. ( Univ. of California/Berkeley (USA) )

Kurczynski, P. ( Univ. of California/Berkeley (USA) )

Muller, R.S. ( Univ. of California/Berkeley (USA) )

Olivier, S.S. ( Lawrence Livermore National Lab. (USA) )

Peter, Y.-A. ( Stanford Univ. (USA) )

Sadoulet, B. ( Lucent Technologies/Bell Labs. (USA) )

Solgaard, O. ( Stanford Univ. (USA) )

Yang, E.H. ( Jet Propulsion Lab. (USA) )

9 more

Publication title:

MOEMS and Miniaturized Systems III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4983

Pub. Year:

2003

Page(from):

227

Page(to):

234

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447838 [0819447838]

Language:

English

Call no.:

P63600/4983

Type:

Conference Proceedings

Details

TDL ID:	ZA00012966
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MOEMS and miniaturized systems
Conf. info. (Number):	2003 : 3rd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2003.01.27-2003.01.29

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