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Tunable Fabry-Perot interferometer for 3- to 4.5-μm wavelength with bulk micromachined reflector carrier

Author(s):
Kurth, S. ( Technische Univ. Chemnitz (Germany) )
Hiller, K.
Neumann, N. ( InfraTec GmbH (Germany) )
Heinze, M.
Doetzel, W. ( Technische Univ. Chemnitz (Germany) )
Gessner, T.
1 more
Publication title:
MOEMS and Miniaturized Systems III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4983
Pub. Year:
2003
Page(from):
215
Page(to):
226
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447838 [0819447838]
Language:
English
Call no.:
P63600/4983
Type:
Conference Proceedings

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