Stress and curvature in MEMS mirrors

Stress and curvature in MEMS mirrors

Author(s):

Gass, F. R. ( Sandia National Labs. (USA) )

Dagel, D. J.

Adams, D.P.

Grossetete, G.D. ( L&M Technologies, Inc. (USA) )

Blum Spahn, O. ( Sandia National Labs. (USA) )

Kemme, S.A.

Mani, S.S.

Malloy, K.J. ( CHTM/Univ. of New Mexico (USA) )

3 more

Publication title:

MOEMS and Miniaturized Systems III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4983

Pub. Year:

2003

Page(from):

87

Page(to):

93

Pages:

7

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447838 [0819447838]

Language:

English

Call no.:

P63600/4983

Type:

Conference Proceedings

Details

TDL ID:	ZA00012966
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MOEMS and miniaturized systems
Conf. info. (Number):	2003 : 3rd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2003.01.27-2003.01.29

Similar Items:

1 Conference Proceedings Optical system properties of a reconfigurable MEMS interconnect Kemme, S.A., Blum Spahn, O., Gass, F. R., Dagel, D. J., Grossetete, G.D. SPIE-The International Society for Optical Engineering	7 Conference Proceedings Confocal photoluminescence method for measuring the carrier migration in structures with quantum dots Popescu, D.P., Eliseev, P.G., Malloy, K.J. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Out-of-plane rotary micromirrors for reconfigurable photonic applications Dagel, D.J., Blum Spahn, O., Allen, J.J., Kemme, S.A., Grossetete, G.D., Gass, F. R. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Shell model of semiconductor quantum dots Eliseev, P.G., Popescu, D.P., Torchynska, T. V., Stintz, A., Malloy, K.J. SPIE - The International Society of Optical Engineering
3 Conference Proceedings Investigation into the response of a micro-electro-mechanical compound pivot mirror using finite element modeling Gass, F.R., Dohner, J.L., Spahn, O.B., Garcia, E.J., Grossetete, G.D. SPIE-The International Society for Optical Engineering	9 Conference Proceedings Compact MMIC-Compatible RF MEMS Switch Dyck, C.W., Plut, T.A., Nordquist, C.D., Kraus, G.M., Schmidt, G.D., Gass, K.L., Finnegan, P.S., Reines, I.C., Sullivan, … SPIE-The International Society for Optical Engineering
4 Conference Proceedings Low Stress, High Reflectivity Thin Films for MEMS Mirrors Picard, Yoosuf N., Adams, David P., Spahn, Olga B., Yalisove, Steven M., Dagel, Daryl J., Sobczak, Joseph Materials Research Society	10 Conference Proceedings High-efficiency optical MEMS by the integration of photonic lattices with surface MEMS Fleming,J.G., Mani,S.S., Lin,S.-Y. SPIE-The International Society for Optical Engineering
5 Conference Proceedings Optical performance of pivoting micromirrors Spahn,O.Blum, Garcia,E.J., Esch,V.C., Grossetete,G., Bitsie,F., Mani,S.S., Jakubczak,J.F. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Requirements for an optical 8-m space telescope with a MEMs deformable mirror to detect Earth-like planets around nearby stars Ford, H.C., Clampin M., Illingworth, G.D., Krist, J.E., Olivier, S.S., Petro, L., Sommagren G.E. SPIE-The International Society for Optical Engineering
6 Conference Proceedings Modeling of the capture and thermal escape of the carriers from InAs quantum dots at different temperatures Popescu, D.P., Eliseev, P.G., Stintz, A., Malloy, K.J. SPIE-The International Society for Optical Engineering	12 Conference Proceedings Surface preparation for selective tungsten deposition on MEMS structures Resnick,P.J., Mani,S.S. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12