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European roadmaps for MOEMS applications (Invited Paper)

Author(s):
Salomon, P.R. ( 4M2C PATRIC SALOMON (Germany) )  
Publication title:
MOEMS and Miniaturized Systems III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4983
Pub. Year:
2003
Page(from):
1
Page(to):
10
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447838 [0819447838]
Language:
English
Call no.:
P63600/4983
Type:
Conference Proceedings

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