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MEMS high-Q tunable capacitor for reconfigurable microwave circuits

Author(s):
Nordquist, C.D. ( Sandia National Labs. (USA) )
Muyshondt, A. ( Sandia National Labs. (USA) )
Pack, M.V. ( Sandia National Labs. (USA) )
Finnegan, P.S. ( Sandia National Labs. (USA) )
Dyck, C.W. ( Sandia National Labs. (USA) )
Reines, I.C. ( Sandia National Labs. (USA) )
Kraus, G.M. ( Sandia National Labs. (USA) )
Sloan, G.R. ( Sandia National Labs. (USA) )
Sullivan, C.T. ( Sandia National Labs. (USA) )
4 more
Publication title:
MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4981
Pub. Year:
2003
Page(from):
1
Page(to):
8
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447814 [0819447811]
Language:
English
Call no.:
P63600/4981
Type:
Conference Proceedings

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