Diffusive transport in supercritical CO2 drying of MEMS structures

Diffusive transport in supercritical CO2 drying of MEMS structures

Author(s):

Resnick, P.J. ( Sandia National Labs. (USA) )
Hankins, M.G. ( Sandia National Labs. (USA) )

Publication title:

Reliability, Testing, and Characterization of MEMS/MOEMS II

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4980

Pub. Year:

2003

Page(from):

229

Page(to):

237

Pages:

9

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447807 [0819447803]

Language:

English

Call no.:

P63600/4980

Type:

Conference Proceedings

Details

TDL ID:	ZA00012963
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Reliability, testing, and characterization of MEMS/MOEMS
Conf. info. (Number):	2003 : 2nd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2003.01.27-2003.01.29

Similar Items:

1 Conference Proceedings Vapor deposition of amino-functionalized self-assembled monolayers on MEMS Hankins, M.G., Resnick, P.J., Clews, P.J., Mayer, T.M., Wheeler, D.R., Tanner, D.M., Plass, R.A. SPIE-The International Society for Optical Engineering	7 Conference Proceedings IN SITU NMR STUDY OF GEL PORE STRUCTURE DURING AGING AND DRYING Smith, D.M., Glaves, C.L., Davis, P.J., Brinker, C.J. Materials Research Society
2 Conference Proceedings Whole wafer critical point drying of MEMS devices Resnick,P.J., Clews,P.J. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Phase transitins on polymer blends and block copolymers induced by selective dilation with supercritical CO2 Watkins. J. J, Brown. D. G, Pollard. A. M, RamachandraRao. S. V, Russell. P. T Kluwer Academic Publishers
3 Conference Proceedings Surface preparation for selective tungsten deposition on MEMS structures Resnick,P.J., Mani,S.S. SPIE-The International Society for Optical Engineering	9 Conference Proceedings Effects of Supercritical CO2 Drying and Photoresist Strip on Low-k Films Reidy, R. F., Zhang, Zhengping, Orozco-Teran, R. A., Gorman, B. P., Mueller, D. W. Materials Research Society
4 Conference Proceedings The porous structure of biodegradable scaffolds obtained with supercritical CO₂ as foaming agent S. Blacher, C. Calberg, G. Kerckhofs, A. Léonard, M. Wevers, R. Jérôme, J.-P. Pirard Elsevier	10 Conference Proceedings Etching of Thermal SiO2 in Supercritical CO2 S. Malhouitre, J. Van Hoeymissen, C. Case, P. Granger Electrochemical Society
5 Conference Proceedings 5 Cleaning Optimization for Reduced Chemical Usage Resnick, P.J., Simonson, R.J., Nelson, G.C., Matlock, C.A., Kelly, M.J. Electrochemical Society	11 Conference Proceedings Influence of TiO₂ Crystalline Structure on Dielectric Resonator Properties from ZnO-Nb₂O₅-TiO₂ Ceramic System for … M. do C.A. Nono, P.J. Castro, E.G.L. Rangel, S.L. Mineiro Trans Tech Publications
6 Conference Proceedings Development of optical MEMS CO2 sensors McNeal, M.P., Moelders, N., Pralle, M.U., Puscasu, I., Last, L., Ho, W., Greenwald, A.C., Daly, J.T., Johnson, E.A., … SPIE-The International Society for Optical Engineering	12 Conference Proceedings Integration of MEMS devices French,P.J. SPIE - The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12