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Resonant frequency method for monitoring MEMS fabrication

Author(s):
Publication title:
Reliability, Testing, and Characterization of MEMS/MOEMS II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4980
Pub. Year:
2003
Page(from):
220
Page(to):
228
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447807 [0819447803]
Language:
English
Call no.:
P63600/4980
Type:
Conference Proceedings

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