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Reciprocating silicon microtribometer

Author(s):
Dubois, P. ( Univ. of Neuchatel (Switzerland) )
Gunten, S. ( Neu Technikum Buchs (Switzerland) )
Enzler, A. ( Neu Technikum Buchs (Switzerland) )
Lippuner, U. ( Neu Technikum Buchs (Switzerland) )
Dommann, A. ( Neu Technikum Buchs (Switzerland) )
Rooij, N.-F. ( Univ. of Neuchatel (Switzerland) )
1 more
Publication title:
Reliability, Testing, and Characterization of MEMS/MOEMS II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4980
Pub. Year:
2003
Page(from):
163
Page(to):
174
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447807 [0819447803]
Language:
English
Call no.:
P63600/4980
Type:
Conference Proceedings

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