Degradation of monolayer lubricants for MEMS

Degradation of monolayer lubricants for MEMS

Author(s):

Dugger, M.T. ( Sandia National Labs. (USA) )
Hohlfelder, R.J. ( Sandia National Labs. (USA) )
Peebles, D.E. ( Sandia National Labs. (USA) )

Publication title:

Reliability, Testing, and Characterization of MEMS/MOEMS II

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4980

Pub. Year:

2003

Page(from):

138

Page(to):

150

Pages:

13

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447807 [0819447803]

Language:

English

Call no.:

P63600/4980

Type:

Conference Proceedings

Details

TDL ID:	ZA00012963
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Reliability, testing, and characterization of MEMS/MOEMS
Conf. info. (Number):	2003 : 2nd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2003.01.27-2003.01.29

Similar Items:

1 Conference Proceedings Developing a New Material for MEMS: Amorphous Diamond Sullivan, J.P., Friedmann, T.A., Boer, M.P. de, Van, D.A. La, Hoflfelder, R.J., Ashby, C.I.H., Dugger, M.T., Mitchell, … Materials Research Society	7 Conference Proceedings Wear Mechanisms in a Reliability Methodology Tanner, D.M., Dugger, M.T. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Counterface Material and Ambient Atmosphere: Role in the Tribological Performance of Diamond Films Dugger, M. T., Peebles, D. E., Pope, L. E. American Chemical Society	8 Conference Proceedings Friction and wear in surface-micromachined tribological test devices Senft,D.C., Dugger,M.T SPIE-The International Society for Optical Engineering
3 Conference Proceedings Pulsed-laser-deposited coatings for stiction and wear reduction in MEMS devices Pelt,J.S., Ramsey,M.E., Magana,R.,Jr., Poindexter,E.,Jr., Boer,M.P.de, LaVan,D.A., Dugger,M.T., Smith,J.H., Durbin,S.M. SPIE - The International Society for Optical Engineering	9 Conference Proceedings Performance of Ultrahard Carbon Wear Coatings on Microgears Fabricated by LIGA AgerIII, J.W., Brown, I.G., Christenson, T.R., Dugger, M.T., Follstaedt, D.M., Knapp, J.A., Monteiro, O.R. Materials Research Society
4 Conference Proceedings Friction and Durability of Chemisorbed Organic Lubricants for Microelectromechanical Systems Dugger, M. T., Senft, D. C., Nelson, G. C. American Chemical Society	10 Conference Proceedings Tensile properties of amorphous diamond films LaVan, D. A., Hohlfelder, R. J., Sullivan, J. P., Friedmann, T. A., Mitchell, M., Ashby, C. I. H. MRS-Materials Research Society
5 Conference Proceedings Vapor deposition of amino-functionalized self-assembled monolayers on MEMS Hankins, M.G., Resnick, P.J., Clews, P.J., Mayer, T.M., Wheeler, D.R., Tanner, D.M., Plass, R.A. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Tensile properties of amorphous diamond films LaVan, D. A., Hohlfelder, R. J., Sullivan, J. P., Friedmann, T. A., Mitchell, M., Ashby, C. I. H. MRS-Materials Research Society
6 Conference Proceedings Silicon Germanium Epitaxy: A New Material For MEMS Boreenstein, J.T., Gerrish, N.D., White, R., Currie, M.T., Fitzgerald, E.A. Materials Research Society	12 Conference Proceedings Utilizing On-Chip Testing and Electron Microscopy to Study Fatigue and Wear in Polysilicon Structural Films Alsem, D.H., Stach, E.A., Muhlstein, C.L., Dugger, M.T., Ritchie, R.O. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12