Surface characterization and adhesion analysis for polysilicon micromachined flaps

Surface characterization and adhesion analysis for polysilicon micromachined flaps

Author(s):

Xue, X. ( Univ. of Illinois/Urbana-Champaign (USA) )
Phinney, L.M. ( Univ. of Illinois/Urbana-Champaign (USA) )

Publication title:

Reliability, Testing, and Characterization of MEMS/MOEMS II

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4980

Pub. Year:

2003

Page(from):

130

Page(to):

137

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447807 [0819447803]

Language:

English

Call no.:

P63600/4980

Type:

Conference Proceedings

Details

TDL ID:	ZA00012963
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Reliability, testing, and characterization of MEMS/MOEMS
Conf. info. (Number):	2003 : 2nd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2003.01.27-2003.01.29

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