A new SEM/FIB crossbeam inspection tool for high-resolution materials and device characterization

A new SEM/FIB crossbeam inspection tool for high-resolution materials and device characterization

Author(s):

Gnauck, P. ( LEO Elektronenmikroskopie GmbH (Germany) )
Hoffrogge, P. ( LEO Elektronenmikroskopie GmbH (Germany) )

Publication title:

Reliability, Testing, and Characterization of MEMS/MOEMS II

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4980

Pub. Year:

2003

Page(from):

106

Page(to):

113

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447807 [0819447803]

Language:

English

Call no.:

P63600/4980

Type:

Conference Proceedings

Details

TDL ID:	ZA00012963
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Reliability, testing, and characterization of MEMS/MOEMS
Conf. info. (Number):	2003 : 2nd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2003.01.27-2003.01.29

Similar Items:

1 Conference Proceedings New crossbeam inspection tool combining an ultrahigh-resolution field emission SEM and a high-resolution FIB Gnauck, P., Hoffrogge, P., Greiser, J. SPIE-The International Society for Optical Engineering	7 Conference Proceedings Implementation of high-resolution reticle inspection in wafer fabs Dayal, A., Bergmann, N.M., Sanchez, P. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Optical Interferometry Techniques for High-resolution Characterization and Diagnostic of New Materials and Components P. De Natale ESA Publications Division	8 Conference Proceedings Defect inspection using a high-resolution pattern image obtained from multiple low-resolution images of the some pattern on an observed noisy SEM image M. Takashima, Y. Midoh, K. Nakamae Society of Photo-optical Instrumentation Engineers
3 Conference Proceedings Device Testing and SEM Testing Tools Collin P. J., Courtois B. Kluwer Academic Publishers	9 Conference Proceedings High Conductivity FIB Deposited Metal Blauner, P. G., Wagner, A. MRS - Materials Research Society
4 Conference Proceedings Optimized screen-printing and SEM-FIB characterization of YSZ thin films for Solid Oxide Fuel Cells and gas sensors devices Morata, A., Tarancon, A., Dezanneau, G., Peiro, F., Morante, R. Materials Research Society	10 Conference Proceedings FIB based measurements for material characterization on MEMS structures Vogel, D., Lieske, D., Gollhardt, A., Keller, J., Sabate, N., Morante, J. R., Michel, B. SPIE - The International Society of Optical Engineering
5 Conference Proceedings High-resolution noncontact thermal characterization of semiconductor devices Christofferson,J., Vashaee,D., Shakouri,A., Melese,P. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Multibeam high-resolution die-to-database reticle inspection Volk,W.W., Broadbent,W.H., Garcia,H.I., Watson,S.G., Lim,P.M., Ruch,W.E. SPIE-The International Society for Optical Engineering
6 Conference Proceedings High Resolution SEM Imaging of Multilayer Thin Films Kingsley, J. R., Ward, I. D., Vitarelli, J. P. MRS - Materials Research Society	12 Conference Proceedings In-line failure analysis on productive wafers with dual-beam SEM/FIB systems Weiland,R., Boit,C., Dawes,N., Dziesiaty,A., Demm,E., Ebersberger,B., Frey,L., Geyer,S., Hirsch,A., Lehrer,C., Meis,P., … SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12