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Opportunities and challenges for laser technology in microelectronics and photonics (Invited Paper)

Author(s):
Hoving, W. ( Philips Ctr. for Industrial Technology (Netherlands) )  
Publication title:
Photon Processing in Microelectronics and Photonics II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4977
Pub. Year:
2003
Page(from):
448
Page(to):
457
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447777 [0819447773]
Language:
English
Call no.:
P63600/4977
Type:
Conference Proceedings

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