F2-laser micropatterning of chrome-coated CaF2 for vacuum-ultraviolet masks
- Author(s):
- Yick, A. ( Univ. of Toronto (Canada) )
- Li, J. ( Univ. of Toronto (Canada) )
- Herman, P.R. ( Univ. of Toronto (Canada) )
- Publication title:
- Photon Processing in Microelectronics and Photonics II
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4977
- Pub. Year:
- 2003
- Page(from):
- 400
- Page(to):
- 410
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447777 [0819447773]
- Language:
- English
- Call no.:
- P63600/4977
- Type:
- Conference Proceedings
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