Blank Cover Image

F2-laser micropatterning of chrome-coated CaF2 for vacuum-ultraviolet masks

Author(s):
Publication title:
Photon Processing in Microelectronics and Photonics II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4977
Pub. Year:
2003
Page(from):
400
Page(to):
410
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447777 [0819447773]
Language:
English
Call no.:
P63600/4977
Type:
Conference Proceedings

Similar Items:

Okoshi, M., Li, J., Herman, P.R.

SPIE - The International Society of Optical Engineering

Ho, S., Aitchison, J.S., Herman, P.R.

SPIE - The International Society of Optical Engineering

Wei, X.M., Chen, K.P., Coric, D., Herman, P.R., Li, J.

SPIE-The International Society for Optical Engineering

Schulz-Ruthenberg, M., Ihlemann, J., Marowsky, G., Nejadmalayeri, A.H., Ng, M.L., Li, J., Herman, P.R.

SPIE - The International Society of Optical Engineering

Ihlemann, J., Mueller, S., Puschmann, S., Schaefer, D., Herman, P.R., Li, J., Wei, M.

SPIE-The International Society for Optical Engineering

Li, P., Herman, P.R., Wei, X.M., Chen, K.P., Ihlemann, J., Marowsky, G., Oesterlin, P., Burghardt, B.

SPIE-The International Society for Optical Engineering

Ng, M.L., Herman, P.R., Nejadmalayeri, A.H., Li, J.

SPIE - The International Society of Optical Engineering

Kurosawa, K., Herman, P. R., Kurmaev, E. Z., Shamin, S. N., Galakhov, V. E., Takigawa, Y., Sasaki, W., Yokotani, A.

MRS - Materials Research Society

Herman, Peter R., Chen, Boyi, Moore, David J.

Materials Research Society

Herman, Peter R., Chen, Boyi, Moore, David J., Canaga-Retnam, Mark

Materials Research Society

Chen, K.P., Herman, P.R., Coric,D., Li, J., Wea, M., Taylor, R.S., Hnatovsky, C.

SPIE-The International Society for Optical Engineering

Lucca, A., Druon, F., Balembois, F., Georges, P., Camy, P., Doualan, J.-L., Moncorge, R.

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12