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Laser-assisted nanofabrication (Invited Paper)

Author(s):
Hong, M.H. ( Data Storage Institute (Singapore) )
Huang, S.M. ( Data Storage Institute (Singapore) )
Luk'yanchuk, B.S. ( Data Storage Institute (Singapore) )
Wang, Z.B. ( Data Storage Institute (Singapore) )
Lu, Y.F. ( Data Storage Institute (Singapore) )
Chong, T.C. ( Data Storage Institute (Singapore) )
1 more
Publication title:
Photon Processing in Microelectronics and Photonics II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4977
Pub. date:
2003
Page(from):
142
Page(to):
155
Pages:
14
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447777 [0819447773]
Language:
English
Call no.:
P63600/4977
Type:
Conference Proceedings

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