One-step lithography for fabrication of a hybrid microlens array using a coding gray-level mask

One-step lithography for fabrication of a hybrid microlens array using a coding gray-level mask

Author(s):

Yao, J. ( Univ. of Strathclyde (United Kingdom) )
Uttamchandani, D.G. ( Univ. of Strathclyde (United Kingdom) )
Zhang, Y.X. ( Sichuan Univ. (China) )
Guo, Y. ( Sichuan Univ. (China) )
Cui, Z. ( Rutherford Appleton Lab. (United Kingdom) )

Publication title:

MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4945

Pub. Year:

2003

Page(from):

130

Page(to):

137

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447401 [0819447404]

Language:

English

Call no.:

P63600/4945

Type:

Conference Proceedings

Details

TDL ID:	ZA00012929
Series ID:	PA00000029
Conf. info. (Name):	Photonics Fabrication Europe : MEMS/MOEMS
Conf. info. (Number):	2002
Conf. info. (Venue):	Brugge, Belgium
Conf. info. (Date):	2002.10.28-2002.10.29

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