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SiON technology for integrated optical sensors (Invited Paper)

Author(s):
Publication title:
Integrated Optical Devices: Fabrication and Testing
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4944
Pub. Year:
2003
Page(from):
195
Page(to):
204
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447395 [0819447390]
Language:
English
Call no.:
P63600/4944
Type:
Conference Proceedings

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