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F2-laser microfabrication of sub-μm gratings in fused silica

Author(s):
Ihlemann, J. ( Laser-Lab. Goettingen e.V. (Germany) )
Mueller, S. ( Laser-Lab. Goettingen e.V. (Germany) )
Puschmann, S. ( Laser-Lab. Goettingen e.V. (Germany) )
Schaefer, D. ( Laser-Lab. Goettingen e.V. (Germany) )
Herman, P.R. ( Univ. of Toronto (Canada) )
Li, J. ( Univ. of Toronto (Canada) )
Wei, M. ( Univ. of Toronto (Canada) )
2 more
Publication title:
Laser Micromachining for Optoelectronic Device Fabrication
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4941
Pub. Year:
2003
Page(from):
94
Page(to):
98
Pages:
5
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447364 [0819447366]
Language:
English
Call no.:
P63600/4941
Type:
Conference Proceedings

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