Blank Cover Image

Fabrication of microstructure using electrochemical etching in hydrofluoric acid

Author(s):
  • Huang, J.-Y. ( Industrial Technology Research Institute (Taiwan) )
  • Tsai, H.-Y. ( Industrial Technology Research Institute (Taiwan) )
  • Wu, C.-H. ( Industrial Technology Research Institute (Taiwan) )
  • Su, C.-C. ( Industrial Technology Research Institute (Taiwan) )
  • Fan, C.-H. ( Industrial Technology Research Institute (Taiwan) )
Publication title:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4936
Pub. Year:
2002
Page(from):
302
Page(to):
306
Pages:
5
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447319 [0819447315]
Language:
English
Call no.:
P63600/4936
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Microstructure Evolution and the Influence of Hydrofluoric Acid Treatment on the Surfaces of Commercial Pure Ti after ECAE

X.N. Zhang, C.L. Huang, J. Song, B. Chen, W.P. Ji

Trans Tech Publications
7 Conference Proceedings The fabrication of a novel projection screen for autostereoscopic display systems

Huang, W.-J., Tsai, C.-H., Wang, N.-Y., Huang, K.-C.

SPIE - The International Society of Optical Engineering
2 Conference Proceedings Electrochemical AC Etching of Aluminum Foils in Hydrochloric Acid Electrolytes

Jeong,J.-H., Kim,S.-S., Kim,H.-G., Choi,C.-H., Lee,D.-N.

Trans Tech Publications
8 Conference Proceedings The fabrication of microretarder for in-cell stereoscopic LCD using reactive liquid crystal

G. Tseng, C. Tsai, H. Y. Lin, W. Huang, K. Huang, K. Lee

SPIE - The International Society of Optical Engineering
3 Conference Proceedings Selectively Etching GaAs/ AlxGa1-xAs Using a Buffered Citric Acid Etch

Rimmer, N.L., Pillote, C., Huang, J.H.

Electrochemical Society
9 Conference Proceedings Design and fabrication of quartz-based micro prism array of dual-view display by using reactive ion etching

C. -Y. Chen, W. -C. Su, T. Y. Hsieh, J. -R. Sze

Society of Photo-optical Instrumentation Engineers
4 Conference Proceedings Fabrication of wall array by electrochemical etching of n-type silicon

Z. Zhao, C. Bai, J. Guo, H. Niu

Society of Photo-optical Instrumentation Engineers
10 Conference Proceedings The calibration of process window model for 55-nm node

T. H. Wu, S. Y. Huang, C. W. Huang, P. R. Tsai, C. H. Yang, I. Y. Su, B. Falch

SPIE - The International Society of Optical Engineering
5 Conference Proceedings Fabrication of 3-D Structure on P-Type Silicon Using Electrochemical Etching

Izuo, S., Saitoh, F., Obji, H., Fukami, T., French, P.J., Tsutsumi, K.

Electrochemical Society
11 Conference Proceedings Characterization of Silicon Carbide Electrochemical Etch in Hydrofluoric Acid Aqueous Solution

D'Arrigo, G., Bougiorno, C., Raineri, V.

Electrochemical Society
6 Conference Proceedings Liberation of Ion Implanted Ge Nanocrystals From a Silicon Dioxide Matrix via Hydrofluoric Acid Vapor Etching

Sharp, I. D., Xu, Q., Liao, C. Y., Ager III, J. W., Beeman, J. W., Yu, K. M., Zakharov, D., Lilienta-Weber, Z., Haller, …

Materials Research Society
12 Conference Proceedings Projected fringe profilometry using a supercontinum light illumination for micro-scale mea

Su, W.-H., Huang, C.-J.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12