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Micromachined magnetometer-accelerometer for a navigation system

Author(s):
  • Cho, J.-M. ( Samsung Electromechanics Co., Ltd. (South Korea) )
  • Kim, K.S. ( Samsung Electromechanics Co., Ltd. (South Korea) )
  • An, S.D. ( Samsung Electromechanics Co., Ltd. (South Korea) )
  • Park, H.J. ( Samsung Electromechanics Co., Ltd. (South Korea) )
  • Hahm, G. ( Samsung Electromechanics Co., Ltd. (South Korea) )
Publication title:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4936
Pub. Year:
2002
Page(from):
293
Page(to):
301
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447319 [0819447315]
Language:
English
Call no.:
P63600/4936
Type:
Conference Proceedings

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