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Ba(Mg1/3Ta2/3)O3 substrate for BaxSr1-xTiO3 thin film used for phase shifter

Author(s):
Fu, C.L. ( Univ. of Electronic Science and Technology of China (China) )
Chen, H.W. ( Univ. of Electronic Science and Technology of China (China) )
Huang, C.G. ( Univ. of Electronic Science and Technology of China (China) )
Hu, J. ( Univ. of Electronic Science and Technology of China (China) )
Hu, W.C. ( Univ. of Electronic Science and Technology of China (China) )
Li, W.Y. ( Univ. of Electronic Science and Technology of China (China) )
Yang, C.R. ( Univ. of Electronic Science and Technology of China (China) )
2 more
Publication title:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4936
Pub. Year:
2002
Page(from):
260
Page(to):
269
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447319 [0819447315]
Language:
English
Call no.:
P63600/4936
Type:
Conference Proceedings

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