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Resonant-typed microscanners fabricated by hybrid PZT deposition process on SOI wafers

Author(s):
Tsaur, J.-J. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Wang, Z.J. ( Tohoku Univ. (Japan) )
Zhang, L. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Ichiki, M. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Maeda, R. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Suga, T. ( Tokyo Univ. (Japan) )
1 more
Publication title:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4936
Pub. Year:
2002
Page(from):
215
Page(to):
224
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447319 [0819447315]
Language:
English
Call no.:
P63600/4936
Type:
Conference Proceedings

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