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Development of a micro hot embossing process for fabricating micro-optical devices (Invited Paper)

Author(s):
  • Shan, X.C. ( National Institute of Advanced Industrial Science and Technology (Japan) and Singapore Institute of Manufacturing Technology (Singapore) )
  • Maeda, R. ( National Institute of Advanced Industrial Science and Technology (Japan) )
  • Murakoshi, Y. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Publication title:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4936
Pub. Year:
2002
Page(from):
67
Page(to):
75
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447319 [0819447315]
Language:
English
Call no.:
P63600/4936
Type:
Conference Proceedings

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