Blank Cover Image

Effect of Annealing at Argon Pressures up to 1.2 Gpa on Hydrogen-Plasma Etched and Hydrogen Implanted Single-Crystalline Silicon

Author(s):
Misiuk, A.
Misiuk, J.B.K.
Barcz, A.
Romano-Rodriguez, A.
Antonova, I.V.
Popov, V.P.
Londos, C.A.
Jun, J.
3 more
Publication title:
Hydrogen materials science and chemistry of metal hydrides
Title of ser.:
NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.:
71
Pub. Year:
2002
Page(from):
441
Page(to):
446
Pages:
6
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISBN:
9781402007309 [1402007302]
Language:
English
Call no.:
N17050/71
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Electrical characteristics of SOI-like structures formed in nitrogen or oxygen implanted silicon treated under high pressure

Antonova, I.V., Misiuk, A., Londos, C.A.

Electrochemical Society
7 Conference Proceedings Annihilation of thermal donors in silicon annealed under high hydrostatic pressure

Misiuk, A.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Effect of stress on defect transformation in hydrogen-implanted silicon and SOI structures

Antonova,J.V., Popov,V.P., Bak-Misiuk,J., Domagala,J., Misiuk,A., Obodnikov,V.I., Gutakovskii,A.K., Romano-Rodriguez,A.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Effect of Annealing at High Hydrostatic Pressure of Silicon Implanted with Helium and Oxygen

Misiuk, A., Katcki, J., Ratajczak, J., Raineri, V., Bak-Misiuk, J., Gawlik, L., Bryja, L., Jun, J.

Kluwer Academic Publishers
3 Conference Proceedings Microstress in high-pressure temperature-treated Czochralski-grown silicon with oxygen concentration up to 1.2 x 1018 cm-3

A. Misiuk

Society of Photo-optical Instrumentation Engineers
9 Conference Proceedings Peculiarities of the thermal donor formation in Czochralski-grown silicon under high hydrostatic pressure

Emtsev,V.V., Oganesyan,G.A., Misiuk,A., Londos,C.A.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Formation and evolution of the oxygen precipitates in CZ-Si upon high pressure- high temperature treatment

Antonova, I.V., Misiuk, A., Popov, V.P., Plotnikov, A.E., Surma, B.

Electrochemical Society
10 Conference Proceedings Non-Crucial Role of the Defects in the splitting for Hydrogen Implanted Silicon With High Boron Concentration

Popov, V. P., Stas, V. F., Antonova, I. V.

MRS - Materials Research Society
5 Conference Proceedings Effect of Stress on Accumulation of Hydrogen and Microstructure of Silicon co-Implanted with Hydrogen and Helium

Misiuk, A., Ratajczak, J., Barcz, A., Bak-Misiuk, J., Shalimov, A., Surma, B., Wnuk, A., Jagielski, J., Antonova, I. V.

Kluwer Academic Publishers
11 Conference Proceedings Modification of Si/SiO2 interface in SOI structures by hydrogen implantation: radiation tolerance

Antonova, I.V.

Electrochemical Society
6 Conference Proceedings Defects and their electronic properties in high-pressure-annealed SOI structures sliced by hydrogen

Popov, V.P., Gutakovskii, A.K., Safronov, L.N., Tyschenko, I.E., Zhuravlev, S.K., Talochkin, A.B., Antonova, A.I., …

Kluwer Academic Publishers
12 Conference Proceedings Effect of high-pressure high-temperature treatment on neutron-irradiation-induced defects in Czochralski silicon

Londos,C.A., Fytros,L.G., Misiuk,A., Bak-Misiuk,J., Prujszczyk,M., Potsidou,M.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12