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Nanoscopic Study of Zirconia Films Grown by Atomic Layer Deposition

Author(s):
Sammelselg, V.
Karlis, J.
Kikas, A.
Aarik, J.
Maendar, H.
Uustare, T.
1 more
Publication title:
Atomistic aspects of epitaxial growth
Title of ser.:
NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.:
65
Pub. Year:
2002
Page(from):
683
Page(to):
692
Pages:
10
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISBN:
9781402006746 [1402006748]
Language:
English
Call no.:
N17050/65
Type:
Conference Proceedings

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