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Defects and their electronic properties in high-pressure-annealed SOI structures sliced by hydrogen

Author(s):
Popov, V.P.
Gutakovskii, A.K.
Safronov, L.N.
Tyschenko, I.E.
Zhuravlev, S.K.
Talochkin, A.B.
Antonova, A.I.
Naumova, O.V.
Obodikov, V.I.
Misiuk, A.
Bak-Misiuk, J.
Domagala, J.
Romano-Rodrigues, A.
Bachrouri, A.
9 more
Publication title:
Progress in SOI structures and devices operating at extreme conditions
Title of ser.:
NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.:
58
Pub. date:
2002
Page(from):
269
Page(to):
288
Pages:
20
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISBN:
9781402005756 [140200575X]
Language:
English
Call no.:
N17050/58
Type:
Conference Proceedings

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