Low dimension properties of nanostructures on ultra thin layers of silicon formed by oxidation of ion cut SOI wafers and electron lithography
- Author(s):
Popov, V.P. Aseev, A.L. Antonova, I.V. Nastaushev, Yu.V. Gavrilova, T.A. Naumova, O.V. Franzusov, A.A. Feafanov, G.N. Kolosanov, V.A. - Publication title:
- Progress in SOI structures and devices operating at extreme conditions
- Title of ser.:
- NATO science series. Series 2, Mathematics, physics and chemistry
- Ser. no.:
- 58
- Pub. Year:
- 2002
- Page(from):
- 87
- Page(to):
- 92
- Pages:
- 6
- Pub. info.:
- Dordrecht: Kluwer Academic Publishers
- ISBN:
- 9781402005756 [140200575X]
- Language:
- English
- Call no.:
- N17050/58
- Type:
- Conference Proceedings
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