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Low dimension properties of nanostructures on ultra thin layers of silicon formed by oxidation of ion cut SOI wafers and electron lithography

Author(s):
Popov, V.P.
Aseev, A.L.
Antonova, I.V.
Nastaushev, Yu.V.
Gavrilova, T.A.
Naumova, O.V.
Franzusov, A.A.
Feafanov, G.N.
Kolosanov, V.A.
4 more
Publication title:
Progress in SOI structures and devices operating at extreme conditions
Title of ser.:
NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.:
58
Pub. date:
2002
Page(from):
87
Page(to):
92
Pages:
6
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISBN:
9781402005756 [140200575X]
Language:
English
Call no.:
N17050/58
Type:
Conference Proceedings

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