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SOL-GEL DEPOSITION PROCESSES OF THIN CERAMIC FILMS

Author(s):
Publication title:
Chemical physics of thin film deposition processes for micro- and nano-technologies
Title of ser.:
NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.:
55
Pub. date:
2002
Page(from):
69
Page(to):
90
Pages:
22
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISBN:
9781402005244 [1402005245]
Language:
English
Call no.:
N17050/55
Type:
Conference Proceedings

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